Festo’s high density/small footprint VTOC pilot gas valve manifold delivers the ideal solution for space-limited semiconductor gas box applications. The VTOC valve manifold can be ordered in wide range of configurations from 2 to 24 valve positions, which gives OEMs the flexibility to order a manifold best suited to available gas box real estate. These manifolds are designed for 2 x 3/2 valves, enabling a compact 24 valve position manifold to accommodate up to 48 solenoid coils. Valve airflow is 10 normal liters (NI)/minute.
VTOC options include: configurable manifold rails (pneumatic and electric connections), multi-pin plug connection with sub-D plug or flat ribbon cable, valve with non-detenting manual override, and choices of pneumatic outlets – push-in connectors, straight, or angled. Also optional are individual contacts for each coil – separate commons – and diodes to ensure the current is in only one direction. This can be used to increase safety in user circuits.
An online configuration tool helps OEMs quickly select the best option for the gas box application. All units are tested and ready to install on delivery.
Image credit: Festo Corporation